A piezoelectric/electrostrictive film element has at least one window part ,a ceramic base body wherein a diaphragm part is so provided as to cover a window part and a film-like piezoelectric/electrostrictive operation part provided in the diaphragm part which comprises a lower electrode , a piezoelectric/ electrostrictive layerand an upper electrode . In this piezoelectric/ electrostrictive film element, the shape of the diaphragm part is made protrusive outward.A method of manufacturing a piezoelectric/electrostrictive film element is disclosed. |