Original document(29 pages)  中文版
    A wavefront measurement system includes a source of electromagnetic radiation. An imaging system directs the electromagnetic radiation at an object plane that it uniformly illuminates. A first grating is positioned in the object plane to condition the radiation entering the input of a projection optic. A projection optical system projects an image of the first grating onto the focal plane. A second grating is positioned at the focal plane that receives a diffracted image of the object plane to form a shearing interferometer. A CCD detector receives the image of the pupil of the projection optical system through the projection optical system and the second grating that forms a fringe pattern if there are aberrations in the projection optical system. Phaseshift readout of fringe pattern can be accomplished by stepping the first grating in a lateral direction and reading each frame with the CCD detector.
Application Number
申请号		 200410001918 Application Date
申请日		 2004.01.15
Title 名称 Transmission shear grating in checkerboard configuration for EUV wavefront sensor
Publication Number
公开号		 1523448 Publication Date
公开日		 2004.08.25
Approval Pub. Date Granted Pub. Date
International Classification 分类号 G02B27/18,G03F7/20
Applicant(s) Name
申请人		 ASML Holding N. V.
Address 地址
Inventor(s) Name 发明人
Attorney & Agent 代理人 ma gao

  
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